What are the types of industrial ceramic parts commonly used insemiconductor equipment_and_high

In the precise and complex manufacturing process of semiconductor equipment, various industrial ceramic parts play a key role.

Alumina ceramic parts are one of the commonly used types, which stand out due to their high hardness, high melting point (about 2050 ℃), and good chemical stability. Its hardness is second only to diamond, and it can withstand high temperature, high pressure, and wear. Its electrical insulation performance is also excellent, and it is commonly used in components such as wafer stages, gas nozzles, and etching chamber liners.

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Aluminum nitride ceramic parts are equally indispensable, with outstanding thermal conductivity (up to 170-230W/(m · K)) and low thermal expansion coefficient, enabling efficient heat dissipation and thermal matching with silicon wafers. They also have good electrical insulation and mechanical strength, making them suitable for areas such as heat sinks and electrode supports. In addition to aluminum oxide and aluminum nitride ceramic parts, other types of industrial ceramic parts also play important roles in semiconductor equipment.

Silicon carbide ceramic parts are favored for their ultra-high hardness, high wear resistance, and excellent high-temperature strength, and can be used to manufacture grinding discs, cutting tools, etc., meeting the high-precision mechanical operation requirements in semiconductor processing. In addition, zirconia ceramic parts are also used in some special semiconductor equipment due to their high toughness and good biocompatibility.

发布于：广东省